Selective wet etching of Hf-based layers

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Authors
Snow, Jim; Claes, Martine; Paraschiv, Vasile; Kraus, Harald; Eitoku, Atsuro; Vos, Rita; Mertens, Paul; Boullart, Werner; De Gendt, Stefan; Heyns, Marc
Conference
Sematech Wafer Clean & Surface Prep Conference
Title
Selective wet etching of Hf-based layers
Publication type
Oral presentation
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