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Opportunities and challenges for integration of ALD barrier layers in damascene process flows

dc.contributor.authorSprey, Hessel
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSutcliffe, Victor
dc.contributor.authorAbell, Thomas
dc.contributor.authorBastings, Hans
dc.contributor.authorStokhof, Maarten
dc.contributor.authorHaukka, Suvi
dc.contributor.authorLi, Wei-Min
dc.contributor.authorBeyer, Gerald
dc.contributor.authorRaaijmakers, Ivo
dc.date.accessioned2021-10-15T16:23:47Z
dc.date.available2021-10-15T16:23:47Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9628
dc.sourceIIOimport
dc.titleOpportunities and challenges for integration of ALD barrier layers in damascene process flows
dc.typeProceedings paper
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorBastings, Hans
dc.contributor.imecauthorStokhof, Maarten
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorRaaijmakers, Ivo
dc.source.peerreviewno
dc.source.conferenceAtomic Layer Deposition Conference
dc.source.conferencedate16/08/2004
dc.source.conferencelocationHelsinki Finland
imec.availabilityPublished - imec
imec.internalnotescd-rom proceedings


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