Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si

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Authors
Takakura, K.; Ohyama, H.; Yoshida, T.; Murakawa, H.; Rafi, Joan Marc; Job, R.; Ulyashin, A.; Simoen, Eddy; Claeys, Cor
Conference
Gettering and Defect Engineering in Semiconductor Technology - GADEST 2003
Title
Effect of electron irradiation on thermal donors in oxygen-doped high-resistivity FZ Si
Publication type
Proceedings paper
Embargo date
9999-12-31
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