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Carrier Profile Determination in Device Structures using AFM-Based Methods

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorClarysse, Trudo
dc.contributor.authorTrenkler, Thomas
dc.contributor.authorHellemans, L.
dc.contributor.authorSnauwaerts, Jan
dc.contributor.authorRaineri, Vito
dc.date.accessioned2021-09-29T13:21:29Z
dc.date.available2021-09-29T13:21:29Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/966
dc.sourceIIOimport
dc.titleCarrier Profile Determination in Device Structures using AFM-Based Methods
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on Semiconductor Characterization: Present Status and Needs; January 1995; Gaithersburg, USA.
dc.source.conferencedate30/01/1995
dc.source.conferencelocationGaithersburg USA
imec.availabilityPublished - open access


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