Authors

Tokei, Zsolt; Sutcliffe, Victor; Demuynck, Steven; Iacopi, Francesca; Roussel, Philippe; Beyer, Gerald; Hoofman, Romano; Maex, Karen

Conference

Proceedings IEEE International Reliability Physics Symposium - IRPS

Title

Impact of the barrier/dielectric interface quality on reliability of Cu porous-low-k interconnects

Publication type

Proceedings paper