Publication:
Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
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1911 since deposited on 2021-10-15
1last month
Acq. date: 2026-07-17
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Statistics
Views
1911 since deposited on 2021-10-15
1last month
Acq. date: 2026-07-17
Citations