Authors

Van der Donck, Tom; Proost, Joris; Rusu, Cristina; Baert, Kris; Van Hoof, Chris; Celis, Jean-Pierre; Witvrouw, Ann

Conference

Micromachining and Microfabrication Process Technology IX

Title

Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications

Publication type

Proceedings paper