Authors

Vanhellemont, Jan; Libezny, Milan; Simoen, Eddy; Claeys, C.; Clauws, P.; Blondeel, A.

Conference

22nd International Conference on the Physics of Semiconductors; 15-19 August 1994; vancouver, BC, Canada.

Title

Spectroscopic study of oxygen related lattice defects in annealed silicon

Publication type

Proceedings paper