Authors

Van Elshocht, Sven; Caymax, Matty; De Gendt, Stefan; Conard, Thierry; Petry, Jasmine; Date, Lucien; Pique, Didier; Heyns, Marc

Issue

4

Journal

J. Electrochemical Society

Volume

151

Title

Composition and growth kinetics of the interfacial layer for MOCVD HfO2 layers on Si substrates

Publication type

Journal article