Show simple item record

Spectroscopic study of oxygen related lattice defects in annealed silicon

dc.contributor.authorVanhellemont, Jan
dc.contributor.authorLibezny, Milan
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, C.
dc.contributor.authorClauws, P.
dc.contributor.authorBlondeel, A.
dc.date.accessioned2021-09-29T13:22:13Z
dc.date.available2021-09-29T13:22:13Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/974
dc.sourceIIOimport
dc.titleSpectroscopic study of oxygen related lattice defects in annealed silicon
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage2399
dc.source.endpage402
dc.source.conference22nd International Conference on the Physics of Semiconductors; 15-19 August 1994; vancouver, BC, Canada.
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record