dc.contributor.author | Vanhellemont, Jan | |
dc.contributor.author | Libezny, Milan | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Claeys, C. | |
dc.contributor.author | Clauws, P. | |
dc.contributor.author | Blondeel, A. | |
dc.date.accessioned | 2021-09-29T13:22:13Z | |
dc.date.available | 2021-09-29T13:22:13Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/974 | |
dc.source | IIOimport | |
dc.title | Spectroscopic study of oxygen related lattice defects in annealed silicon | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.source.peerreview | no | |
dc.source.beginpage | 2399 | |
dc.source.endpage | 402 | |
dc.source.conference | 22nd International Conference on the Physics of Semiconductors; 15-19 August 1994; vancouver, BC, Canada. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |