A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

Publication:

2004

Proceedings Paper

Author(s)

;

Van den Broeck, Kristel

;

Van Hoeymissen, Jan

;

;

Riedel, W.

;

Braun, C.

1930 since deposited on 2021-10-15

1last month

Acq. date: 2026-10-12