Authors

Van Hoornick, Nausikaa; Van den Broeck, Kristel; Van Hoeymissen, Jan; Heyns, Marc; Riedel, W.; Braun, C.

Conference

Proceedings of the International Symposium on Semiconductor Manufacturing - ISSM

Title

A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

Publication type

Proceedings paper