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A life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab

dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorVan den Broeck, Kristel
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorHeyns, Marc
dc.contributor.authorRiedel, W.
dc.contributor.authorBraun, C.
dc.date.accessioned2021-10-15T17:04:42Z
dc.date.available2021-10-15T17:04:42Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9760
dc.sourceIIOimport
dc.titleA life-cycle cost (LCC) fab model - interaction between activities in IC manufacturing and their supporting facilities within a fab
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpage409
dc.source.endpage412
dc.source.conferenceProceedings of the International Symposium on Semiconductor Manufacturing - ISSM
dc.source.conferencedate27/09/2004
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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