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Two-dimensional carrier profiling in advanced devices with pico-meter resolution

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorAlvarez, David
dc.contributor.authorEyben, Pierre
dc.contributor.authorFouchier, Marc
dc.contributor.authorHartwich, J.
dc.contributor.authorSlesazech, S.
dc.contributor.authorVerheyen, Peter
dc.contributor.authorHogg, S.
dc.date.accessioned2021-10-15T17:23:01Z
dc.date.available2021-10-15T17:23:01Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9819
dc.sourceIIOimport
dc.titleTwo-dimensional carrier profiling in advanced devices with pico-meter resolution
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVerheyen, Peter
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage63
dc.source.endpage67
dc.source.conferenceProceedings Ultimate Integration of Silicon (ULIS) Workshop
dc.source.conferencedate11/03/2004
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access


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