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Errors in near-surface and interfacial profiling of boron and arsenic

dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorBrijs, Bert
dc.contributor.authorConard, Thierry
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorFrühauf, J.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorBuyuklimanli, T.
dc.contributor.authorVandenberg, J.A.
dc.contributor.authorKimura, K.
dc.date.accessioned2021-10-15T17:24:37Z
dc.date.available2021-10-15T17:24:37Z
dc.date.issued2004-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9824
dc.sourceIIOimport
dc.titleErrors in near-surface and interfacial profiling of boron and arsenic
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.beginpage618
dc.source.endpage631
dc.source.conferenceProceedings of the 14th Int. Conference on Secondary Ion Mass Spectometry and Related Topics
dc.source.conferencedate14/09/2003
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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