Authors

Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger

Conference

Silicon Front-End Junction Formation - Physics and Technology

Title

(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers

Publication type

Oral presentation