Authors

Veloso, Anabela; Kottantharayil, Anil; Witters, Liesbeth; Brus, Stephan; Kubicek, Stefan; de Marneffe, Jean-Francois; Sijmus, Bram; Devriendt, Katia; Lauwers, Anne; Kauerauf, Thomas; Jurczak, Gosia; Biesemans, Serge

Conference

Technical Digest International Electron Devices Meeting - IEDM

Title

Work function engineering by FUSI and its impact on the performance and reliability of oxynitride and Hf-silicate based MOSFETs

Publication type

Proceedings paper