Cleaning of nanoparticles in semiconductor manufacturing

Thumbnail
Metadata
Show full item record
Authors
Vereecke, Guy; Arnauts, Sophia; Doumen, Geert; Eitoku, Atsuro; Fransaer, J.; Fyen, Wim; Holsteyns, Frank; Kenis, Karine; Lee, Kuntack; Lux, Marcel; Snow, Jim; Vinckier, Chris; Vos, Rita; Xu, Kaidong; Mertens, Paul
Conference
BePCIS Seminar on Selected Topics in Nanotechnology
Title
Cleaning of nanoparticles in semiconductor manufacturing
Publication type
Oral presentation
Collections