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Cleaning of nanoparticles in semiconductor manufacturing

dc.contributor.authorVereecke, Guy
dc.contributor.authorArnauts, Sophia
dc.contributor.authorDoumen, Geert
dc.contributor.authorEitoku, Atsuro
dc.contributor.authorFransaer, J.
dc.contributor.authorFyen, Wim
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorKenis, Karine
dc.contributor.authorLee, Kuntack
dc.contributor.authorLux, Marcel
dc.contributor.authorSnow, Jim
dc.contributor.authorVinckier, Chris
dc.contributor.authorVos, Rita
dc.contributor.authorXu, Kaidong
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-15T17:35:24Z
dc.date.available2021-10-15T17:35:24Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9857
dc.sourceIIOimport
dc.titleCleaning of nanoparticles in semiconductor manufacturing
dc.typeOral presentation
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conferenceBePCIS Seminar on Selected Topics in Nanotechnology
dc.source.conferencedate26/10/2004
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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