Evaluation of megasonic cleaning for sub-90-nm technologies

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Authors
Vereecke, Guy; Holsteyns, Frank; Arnauts, Sophia; Kenis, Karine; Lux, Marcel; Vos, Rita; Snow, Jim; Mertens, Paul
Conference
7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
Title
Evaluation of megasonic cleaning for sub-90-nm technologies
Publication type
Oral presentation
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