Damage accumulation and dopant migration during shallow As and Sb implantation into Si

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Authors
Werner, M.; van den Berg, J.A.; Armour, D.G.; Vandervorst, Wilfried; Collart, E.H.J.; Goldberg, R.D.; Bailey, P.; Noakes, T.C.Q.
Journal
Nuclear Instruments & Methods in Physics Research B
Volume
216
Title
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
Publication type
Journal article
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