Thickness and temperature dependent resistivity of thin copper films

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Authors
Zhang, Wenqi; Brongersma, Sywert; Clarysse, Trudo; Wu, Wen; Vervoort, Iwan; Palmans, Roger; Hoflijk, Ilse; Bender, Hugo; Hui, W.; Carbonell, Laure; Rosseel, Erik; Vandervorst, Wilfried; Maex, Karen
Conference
Advanced Metallization Conference 2003
Title
Thickness and temperature dependent resistivity of thin copper films
Publication type
Proceedings paper
Embargo date
9999-12-31
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