Influence of the electron mean free path on the resistivity of thin metal films

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Authors

Zhang, Wenqi; Brongersma, Sywert; Richard, Olivier; Brijs, Bert; Palmans, Roger; Froyen, Ludo; Maex, Karen

Issue

1_4

Journal

Microelectronic Engineering

Volume

76

Title

Influence of the electron mean free path on the resistivity of thin metal films

Publication type

Journal article

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