Publication:

HfO2 and HfSixOyNz high-k layers deposited by MOCVD in mixed gas flows of N2O and O2

Date

2004

Proceedings Paper

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Author(s)

;

Van Elshocht, Sven

;

Conard, Thierry

;

;

Richard, Olivier

;

;

De Gendt, Stefan

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1916 since deposited on 2021-10-15

Acq. date: 2026-05-18