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HfO2 and HfSixOyNz high-k layers deposited by MOCVD in mixed gas flows of N2O and O2
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1906 since deposited on 2021-10-15
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Acq. date: 2025-10-25
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Views
1906 since deposited on 2021-10-15
418item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations