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Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
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1880 since deposited on 2021-10-16
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Acq. date: 2026-01-07
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1880 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-01-07
Citations