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Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
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1891 since deposited on 2021-10-16
1last month
Acq. date: 2026-08-04
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Statistics
Views
1891 since deposited on 2021-10-16
1last month
Acq. date: 2026-08-04
Citations