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Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric

dc.contributor.authorAbell, Thomas
dc.contributor.authorIacopi, Francesca
dc.contributor.authorProkopowicz, Greg
dc.contributor.authorSun, Brad
dc.contributor.authorMazurenko, Alex
dc.contributor.authorTravaly, Youssef
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorJonas, Alain
dc.contributor.authorSullivan, Chris
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorLiou, Huey-Chiang
dc.contributor.authorTower, Josua
dc.contributor.authorGostein, Michael
dc.contributor.authorGallagher, Mike
dc.contributor.authorCalvert, Jeff
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T00:42:20Z
dc.date.available2021-10-16T00:42:20Z
dc.date.issued2005-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9992
dc.sourceIIOimport
dc.titleComparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage457
dc.source.endpage462
dc.source.conferenceAdvanced Metallization Conference 2004
dc.source.conferencedate19/10/2004
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XX


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