Request a copy of the file
Enter the following information to request a copy for the following item: Impact of Hf-precursor choice on scaling and performance of high-k gate dielectrics
Requesting the following file: 15699.pdf
Enter the following information to request a copy for the following item: Impact of Hf-precursor choice on scaling and performance of high-k gate dielectrics
Requesting the following file: 15699.pdf