Publication:

Impact of Hf-precursor choice on scaling and performance of high-k gate dielectrics

Date

2007

Proceedings Paper

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Files

15699.pdf 374.94 KB

Author(s)

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Fedorenko, Yanina

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Delabie, Annelies

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Ragnarsson, Lars-Ake

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Van Elshocht, Sven

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Metrics

1879 since deposited on 2021-10-16

Acq. date: 2025-12-11