Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. The role of preamorphization and activation for ultra shallow junction formation on strained Si layers grown on SiGe buffer
  3. Statistics

Statistics by Category

Reports

  • Most viewed
  • Most viewed per month
  • Top city views
  • File Visits
Item Views
The role of preamorphization and activation for ultra shallow junction formation on strained Si layers grown on SiGe buffer 1355

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings