Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
Influence of the height difference between the first and second nitride layer on erosion and dishing in the dual nitride approach for shallow trench isolation
Statistics
Statistics by Category
Download view's map
PNG
JPEG/JPG
Reports
Most viewed
Most viewed per month
Top city views
File Visits
Export Excel
Export CSV
Item
Views
Influence of the height difference between the first and second nitride layer on erosion and dishing in the dual nitride approach for shallow trench isolation
1372