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Browsing by Author "Abe, Yuichi"

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    High-accuracy optical proximity correction modeling using advanced critical dimension scanning electron microscope-based contours in next-generation lithography

    Hibino, Daisuke
    ;
    Shindo, Hiroyuki
    ;
    Abe, Yuichi
    ;
    Hojyo, Yutaka
    ;
    Fenger, Germain
    ;
    Do, Thuy
    Journal article
    2011-02, Journal of Micro/Nanolithography MEMS and MOEMS, (10) 1, p.13012

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