Browsing by Author "Abe, Yuichi"
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Publication High-accuracy optical proximity correction modeling using advanced critical dimension scanning electron microscope-based contours in next-generation lithography
;Hibino, Daisuke ;Shindo, Hiroyuki ;Abe, Yuichi ;Hojyo, Yutaka ;Fenger, GermainDo, ThuyJournal article2011-02, Journal of Micro/Nanolithography MEMS and MOEMS, (10) 1, p.13012