Publication:
High-accuracy optical proximity correction modeling using advanced critical dimension scanning electron microscope-based contours in next-generation lithography
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1948 since deposited on 2021-10-19
1last week
Acq. date: 2026-07-28
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Statistics
Views
1948 since deposited on 2021-10-19
1last week
Acq. date: 2026-07-28
Citations