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Browsing by Author "Adams, Jacob"

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    EUV resist requirements: absorbance and acid yield

    Gronheid, Roel  
    ;
    Fonseca, Carlos
    ;
    Leeson, Michael
    ;
    Adams, Jacob
    ;
    Strahan, Jeff
    ;
    Willson, C. Grant
    Proceedings paper
    2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.727332
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    Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists

    Straham, Jeffrey
    ;
    Adams, Jacob
    ;
    Jen, Wei-Lun
    ;
    Vanleenhove, Anja  
    ;
    Neikirk, Colin
    Proceedings paper
    2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.72733G

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