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Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists
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1969 since deposited on 2021-10-18
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Acq. date: 2025-10-24
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1969 since deposited on 2021-10-18
432item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations