Browsing by Author "Adan, Ofer"

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Characterization of EUV resists for defectivity at 32nm

Montal, Ofir
;
Dolev, Ido
;
Rosenzweig, Moshe
;
Dotan, Kfir
;
Meshulach, Doron
;
Adan, Ofer
Proceedings paper
2011, Metrology, Inspection, and Process Control XXV, 27/02/2011, p.79710G
Recess metrology challenges for 3D device architectures in advanced technology nodes

Santoro, Gaetano
;
Houchens, Kevin
;
Bogdanowicz, Janusz
;
Elizov, Moshe
;
Yaron, Lior
Proceedings paper
2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.120530L