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Browsing by Author "Agnihotri, Om Prakash"

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    Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices

    Agnihotri, Om Prakash
    ;
    Jain, Suresh
    ;
    Poortmans, Jef  
    ;
    Szlufcik, Jozef  
    ;
    Beaucarne, Guy
    ;
    Nijs, Johan
    Journal article
    2000, Semiconductor Science and Technology, (15) 7, p.R29-R40
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    Influence of hydrogen on losses in silicon oxynitride planar optical waveguides

    Sahu, B. S.
    ;
    Agnihotri, Om Prakash
    ;
    Jain, Suresh
    ;
    Mertens, Robert  
    ;
    Kato, I.
    Journal article
    2000, Semiconductor Science and Technology, (15) 3, p.L11-L14
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    Influences of hydrogen on losses in silicon oxynitride planar optical waveguides

    Sahu, B. S.
    ;
    Agnihotri, Om Prakash
    ;
    Jain, Suresh
    ;
    Mertens, Robert  
    ;
    Nijs, Johan
    ;
    Isamu, K.
    Proceedings paper
    2000, Proceedings of the International Conference on the Physics of Semiconductor Devices; December 1999; New Delhi, India., p.438-443

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