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Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices
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1977 since deposited on 2021-10-14
2last month
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Acq. date: 2025-12-07
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1977 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2025-12-07
Citations