Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices
Publication:
Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices
Date
2000
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
4029.pdf
186.44 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Agnihotri, Om Prakash
;
Jain, Suresh
;
Poortmans, Jef
;
Szlufcik, Jozef
;
Beaucarne, Guy
;
Nijs, Johan
;
Mertens, Robert
Journal
Semiconductor Science and Technology
Abstract
Description
Metrics
Views
1974
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1974
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations