Browsing by Author "Andrle, Anna"

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Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

Saadeh, Qais
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Mesilhy, Hazem
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Soltwisch, Victor
;
Erdmann, Andreas
;
Ciesielski, Richard
Proceedings paper
2022, Photomask Technology Conference, SEP 26-29, 2022, p.Art. 122930Y
Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Hoenicke, Philipp
;
Kayser, Yves
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Nikolaev, Konstantin, V
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Soltwisch, Victor
;
Scheerder, Jeroen
Journal article
2022, SMALL, (18) 6, p.2105776
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques

Hoenicke, Philipp
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Kayser, Yves
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Soltwisch, Victor
;
Waehlish, Andre
;
Wauschkuhn, Nils
Proceedings paper
2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023
Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm

Saadeh, Qais
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Naujok, Philipp
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Philipsen, Vicky
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Hoenicke, Philipp
;
Laubis, Christian
Journal article
2021, OPTICS EXPRESS, (29) 25, p.40993-41013