Browsing by Author "Anwand, Wolfgang"

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Junction formation in Ge by ion implantation

Satta, Alessandra
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Simoen, Eddy
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Van Daele, Benny
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Clarysse, Trudo
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Nicholas, Gareth
Proceedings paper
2007-05, Proceedings International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling - INSIGHT, 6/05/2007, p.297-304
Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams

Uedono, Akira
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Armini, Silvia
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Zhang, Yu
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Kakizaki, Takeaki
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Krause-Rehberg, Reinhard
Journal article
2016, Applied Surface Science, 368, p.272-276