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Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams
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Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Uedono, Akira
;
Armini, Silvia
;
Zhang, Yu
;
Kakizaki, Takeaki
;
Krause-Rehberg, Reinhard
;
Anwand, Wolfgang
;
Wagner, Andreas
Journal
Applied Surface Science
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1905
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations
Metrics
Views
1905
since deposited on 2021-10-23
Acq. date: 2025-12-10
Citations