Publication:
Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams
Date
| dc.contributor.author | Uedono, Akira | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Zhang, Yu | |
| dc.contributor.author | Kakizaki, Takeaki | |
| dc.contributor.author | Krause-Rehberg, Reinhard | |
| dc.contributor.author | Anwand, Wolfgang | |
| dc.contributor.author | Wagner, Andreas | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-23T15:43:24Z | |
| dc.date.available | 2021-10-23T15:43:24Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 0169-4332 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27413 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0169433216301283 | |
| dc.source.beginpage | 272 | |
| dc.source.endpage | 276 | |
| dc.source.journal | Applied Surface Science | |
| dc.source.volume | 368 | |
| dc.title | Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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