Browsing by Author "Arghavani, R."
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Publication Full-field EUV and immersion lithography integration in 0.186μm² FinFET 6T-SRAM cell
Proceedings paper2008, Technical Digest International Electron Devices Meeting - IEDM, 15/12/2008, p.861-864Publication The influence of post-etch InGaAs Fin profile on electrical performance
Proceedings paper2013, Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM, 24/09/2013, p.700-701