Browsing by Author "Armour, D.G."

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Damage accumulation and dopant migration during shallow As and Sb implantation into Si

Werner, M.
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van den Berg, J.A.
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Armour, D.G.
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Vandervorst, Wilfried
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Collart, E.H.J.
Journal article
2004, Nuclear Instruments & Methods in Physics Research B, 216, p.67-74
High depth resolution characterization of the damage and annealing behaviour of ultrashallow As-implants in Si

van den Berg, J.A.
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Armour, D.G.
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Werner, M.
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Whelan, S.
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Vandervorst, Wilfried
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Clarysse, Trudo
Proceedings paper
2002, Proceedings 14th International Conference on Ion Implantation Technology Conference, 22/09/2002, p.597-600
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films

Van den berg, J.
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Reading, M.A.
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Armour, D.G.
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Bailey, P.
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Noakes, T.
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Conard, Thierry
Meeting abstract
2009, 5th International Workshop on High-Resolution Depth Profiling, 15/11/2009
Sub nanometer depth resolution profiling of the evolution and annealing of damage and the dopant redistribution of ultra-shallow As and Sb implants in Si

van den Berg, J.A.
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Werner, M.
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Armour, D.G.
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Vandervorst, Wilfried
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Clarysse, Trudo
Meeting abstract
2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.446