Browsing by Author "Auzelyte, Vaida"

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EUV resist contrast loss determination using interference lithography

Langner, Andreas
;
Solak, Harun H.
;
Auzelyte, Vaida
;
Ekinci, Yasin
;
David, Christian
Proceedings paper
2009, International Symposium on Extreme Ultraviolet Lithography, 18/10/2009
Measuring resist-induced contrast loss using EUV interference lithography

Langner, Andreas
;
Solak, Harun H.
;
Gronheid, Roel
;
van Setten, Eelco
;
Auzelyte, Vaida
Proceedings paper
2010, Extreme Ultraviolet (EUV) Lithography, 21/02/2010, p.76362X