Publication:

Measuring resist-induced contrast loss using EUV interference lithography

Date

2010

Proceedings Paper

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Files

20385.pdf 1.89 MB

Author(s)

Langner, Andreas

;

Solak, Harun H.

;

;

van Setten, Eelco

;

Auzelyte, Vaida

;

;

van Ingen Schenau, Koen

;

Metrics

1862 since deposited on 2021-10-18

Acq. date: 2025-12-09