Browsing by Author "Büchel, D."
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Publication Evaluating probes for "electrical" atomic force microscopy
Proceedings paper1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436Publication Evaluating probes for "electrical" atomic force microscopy
Journal article2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427Publication Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
Journal article1999, Microelectronic Engineering, (46) 1_4, p.113-116