Browsing by Author "Babu, S. V."
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Publication Chemical mechanical planarization of patterned InP in shallow trench isolation (STI) template structures using hydrogen peroxide-based silica slurries containing oxalic acid or citric acid
Journal article2014, Microelectronic Engineering, 116, p.17-21Publication Chemical mechanical polishing of Ge using colloidal silica particles and H2O2
Journal article2011, Electrochemical and Solid-State Letters, (14) 7, p.254-257