Browsing by Author "Barnes, Levi"

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Double patterning OPC and design for 22nm to 16nm device nodes

Lucas, Kevin
;
Cork, Chris
;
Miloslavsky, Alex
;
Luk-Pat, Gerry
;
Li, Xiaohai
;
Barnes, Levi
;
Gao, Weimin
Proceedings paper
2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009
Interactions of double patterning technology with wafer processing, OPC and design flows

Lucas, Kevin
;
Cork, Chris
;
Miloslavsky, Alex
;
Luk-Pat, Gerry
;
Barnes, Levi
;
Hapli, John
Proceedings paper
2008, Optical Microlithography XXI, 24/02/2008, p.692403