Browsing by Author "Bauer, T."
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Publication A controlled deposition of organic contamination and the removal with ozone based cleaning
Proceedings paper2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.223-226Publication Controlled deposition of organic contamination and removal with ozone-based cleaning
Journal article2001, Journal of the Electrochemical Society, (148) 3, p.G118-125Publication Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.143-147Publication Investigating the role of gas cavitation in megasonic nanoparticle removal
Journal article2004, Micro, (22) 1, p.57-63Publication Surface characterization after different wet chemical cleans
Proceedings paper2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.67-70