Browsing by Author "Bazley, D. J."

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A simulation evaluation of 100 nm CMOS device performance

Jones, S. K.
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Bazley, D. J.
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Augendre, Emmanuel
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Badenes, Gonçal
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De Keersgieter, An
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Skotnicki, T.
Proceedings paper
2001, Proceedings of the International Conference on Simulation of Semiconductor Physics and Processes - SISPAD, 5/09/2001, p.288-291
Active area oxidation during the densification of shallow trench isolation for sub-0.25 micron CMOS

Bazley, D. J.
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Jones, S. K.
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Badenes, Gonçal
Proceedings paper
1998, Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC, 8/09/1998, p.124-127
Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling

Jones, S. K.
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Ahmed, M.
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Bazley, D. J.
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Beanland, R. J.
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De Wolf, Ingrid
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Hill, C.
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Rothwell, W. J.
Proceedings paper
1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.60-75
Simulation of advanced-LOCOS capability for sub-0.25 micron CMOS isolation

Jones, S. K.
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Bazley, D. J.
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Beanland, R.
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Badenes, Gonçal
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Scaife, B.
Proceedings paper
1997, 1997 International Conference on Simulation of Semiconductor Processes and Devices - SISPAD, 8/09/1997, p.185-188