Browsing by Author "Becker, Lucas"
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Publication Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration
; ; ; ; ; Proceedings paper2020-09, PRiME 2020: Semiconductor Wafer Bonding: Science, Technology, and Applications 16, 4/10/2020, p.157-166Publication Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration
; ; ; ; ; Meeting abstract2020-07, ECS 2020 Fall Meeting (PRiME): Symposium G01 Semiconductor Wfr Bonding; Science Technology and Applications 16, 4/10/2020, p.G03-1640