Publication:
Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration
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1922 since deposited on 2021-10-29
5last month
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Acq. date: 2026-10-04
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Statistics
Views
1922 since deposited on 2021-10-29
5last month
3last week
Acq. date: 2026-10-04
Citations