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Epitaxial growth of active Si on top of SiGe etch stop layer in view of 3D device integration
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1914 since deposited on 2021-10-29
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Acq. date: 2025-12-15
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1914 since deposited on 2021-10-29
1last month
1last week
Acq. date: 2025-12-15
Citations